Thermocouples for ASM Epsilon® Reactors
Solutions for Semiconductor Applications > Temperature Measurement for Semiconductor Tools
Conax Technologies Technologies offers a complete selection of thermocouples for the 150mm and 200mm versions of ASM Epsilon Reactor.
Conax can work with your engineering staff to create a special variation of a standard probe offering that is uniquely designed to accomplish your specific objective.
The standard offering of these probes has the center thermocouple with a bead blasted (diffused) tip. The other probes are supplied clear.
Some variations we can offer include special bead blasting of the quartz sheath, multiple junctions contained within a single sheath, special junction locations and other dimensional variations.
Product Features
- 150mm and 200mm versions
- Type R thermocouple - special limits of error
- Semiconductor grade GE series 214 quartz sheaths
- Each probe is heat sealed in a plastic bag individually packaged in its own foam padded box
Conax Services
- Quartz sheath rebuild option is available.
- Platinum trade-in program available.
- NIST traceable calibration services available for individual probes at specific temperatures - calibration data on raw wire is also available in the manufacture of your probe in accordance with ASTM protocol.
- Allow Conax to carry your inventory using our Customer Managed Inventory (CMI) system to assure you of next day delivery on all items.
EPSILON® is a registered trademark of ASM International. Neither Conax Technologies Technologies nor its products are affiliated with, approved by or sponsored by ASM International.
